A Device Structure for High Intensity Polarized Light Exposure System
The utility model claims an optical polarizing device and exposure device comprising the same. the optical polarizing device comprises a cooling chamber for containing the cooling fluid and a polarization component the polarization component is set in the cooling chamber wherein the surface of the polarization component for receiving the light to be polarized towards the first side of the cooling chamber; The first side of the cooling chamber is provided with an opening or the first side of the cooling chamber is provided with a first wall capable of transmitting light. The exposure device comprises such an optical polarizing device and a light source for emitting light to be polarized. The technical solution of the utility model is capable of absorbing heat from the light emitted by the light source by cooling fluid during the working period of the device and/or absorbing heat from the polarization component to cool the polarization component so as to reduce or avoid the polarization component included by the polarization component is damaged due to excessive heat .
Countries or Regions:
CN
Invention Code:
IP.PA.01373
Contact Us:
okt@ust.hk
Authors:
Key Features:
Specification:
Category:
TAP - Microelectronics
Reference:
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