Thermal Radiation Microsensor Comprising Thermoelectric Micro Pillars
A thermal radiation microsensor can comprise thermoelectric micro pillars in which multiple vertically standing thermoelectric micro pillars can act as thermoelectric pairs and mechanical support of an absorption layer. Radiation absorbed by the absorption layer can produce a temperature difference which drives the thermocouple comprising p-type and n-type micro pillars to output a voltage. Multiple thermocouples can be connected in series to improve the signal output.
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US
Invention Code:
IP.PA.00854
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okt@ust.hk
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TAP - Microelectronics
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