Method and Apparatus for an Integrated Capacitor
An integrated capacitor can be fabricated with both electrodes formed by trenches for low resistance. According to one embodiment the capacitor can comprise a first trench electrode one or more dielectric layers and a second trench electrode. The first trench electrode and the second trench electrode can be fabricated in different trenches to improve capacitance density and resistance of the integrated capacitor.
Countries or Regions:
US
Invention Code:
IP.PA.00832
Contact Us:
okt@ust.hk
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Category:
TAP - Microelectronics
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